Датчик линейных перемещений LIP 481 V HEIDENHAIN

Specifications

LIP 481 V

LIP 481 U

Area of application

High vacuum, up to 10–7 mbar

Ultrahigh vacuum, up to 10–11 mbar

Measuring standard*

Coefficient of linear expansion

DIADUR phase grating on glass or Zerodur glass ceramic

Glass: αtherm  8 · 10–6 K–1; Zerodur glass ceramic: αtherm  (0 ± 0.1) x 10–6 K–1

Accuracy grade*

± 1 µm, ± 0.5 µm

Position error

within one signal period

± 0.02 µm

Measuring length ML*in mm

70 120 170 220 270 320 370 420

Reference marks

One at midpoint of measuring length

Output signals

  1 VPP

Signal period

2 µm

Cutoff frequency –3 dB

≥ 300 kHz

Traversing speed

36 m/min

Power supply

Current consumption

5 V DC ± 5%

< 190 mA

Electrical connection

D-sub connector (male) 15-pin, interface electronics integrated in the connector

Housing lead-through*(see page 4)

• • None (interface electronics in vacuum)
• • High-vacuum compatible (interface electronics outside of vacuum)

D sub (not included in delivery, interface electronics outside of vacuum)

Cable length of scanning head to APE*

• • 0.5 m or 1 m
• • 0.5 m or 1 m to the housing lead-through and 0.5 m to the APE

0.5 m or 1 m to the housing lead-through and 0.5 m to the APE

Other cable lengths on request, but ≤ 3 m between scanning head and APE

Cable length after APE

≤ 20 m (with HEIDENHAIN cable)

Vibration 55 to 2 000 Hz

Shock 11 ms

≤ 200 m/s2 (EN 60 068-2-6)

≤ 500 m/s2 (EN 60 068-2-27)

Operating temperature

0 °C to 40 °C

Bake-out temperature

100 °C

120 °C

Materials

PCB: Ceramic

Adhesives: UHV-compatible, temperature resistant

Weight Scanning head

Connector

Scale

Connecting cable

50 g (without cable)

32 g, with integrated interface electronics: 140 g

5.6 g + 0.2 g/mm measuring length

38 g/m